Switching circuit

ABSTRACT

In one embodiment, the invention can be a switching circuit, the switching circuit including a passive switch coupled to a first switch terminal; a driving switch coupled in series with the passive switch and a second switch terminal, the driving switch configured to turn the passive switch on and off; a power source configured to provide power to the passive switch and the driving switch; and a monitoring circuit configured to receive an indication that a switching circuit voltage exceeds a predetermined amount and, in response, reduce the power provided to the driving switch; or receive an indication that a switching circuit current exceeds a predetermined amount and, in response, reduce the power provided to the driving switch.

CROSS REFERENCE TO RELATED APPLICATIONS

The present application is a continuation in part of U.S. patentapplication Ser. No. 14/734,053, filed Jun. 9, 2015, which claims thebenefit of U.S. Provisional Patent Application No. 62/118,552, filedFeb. 20, 2015. The present application further claims the benefit ofU.S. Provisional Patent Application No. 62/117,728, filed on Feb. 18,2015. The foregoing references are incorporated herein by reference intheir entireties.

BACKGROUND

Semiconductor wafer fabrication can use plasma processing to manufacturesemiconductor devices, such as microprocessors, memory chips, and otherintegrated circuits and devices. Plasma processing involves energizing agas mixture by introducing RF energy. This gas mixture is typicallycontained in a vacuum chamber, also called plasma chamber, and the RFenergy is introduced through electrodes or other means in the chamber.In a typical plasma process, the RF generator generates power at an RFfrequency and this power is transmitted through RF cables to the plasmachamber.

To provide efficient transfer of power from the generator to the plasmachamber, a matching network is used. The purpose of the matching networkis to transform the plasma impedance (usually a low value) to a valuesuitable for the RF generator. In many cases, particularly in waferfabrication processes, the RF power is transmitted through 50 Ohmcoaxial cables and the system impedance of the RF generators is also 50Ohm. On the other hand, the impedance of the plasma, driven by the RFpower, varies and this impedance must be transformed to non-reactive 50Ohm (i.e., 50+j0) for maximum power transmission. RF matching networksperform this task of continuously transforming the plasma impedance to50 Ohm for the RF generator. A typical RF matching network includesvariable capacitors and a microprocessor-based control circuit tocontrol the capacitance values of the variable capacitors. The value andsize of the variable capacitors are influenced by the power handlingcapability, the frequency of operation, and the impedance range of theplasma chamber.

The predominant variable capacitor in use in RF matching networks is theVacuum Variable Capacitor (VVC). Electronically Variable Capacitor (EVC)technology, however, is emerging as an alternative, as EVCs can beswitched more quickly. Faster switching enables faster matching, whichenables faster manufacturing.

High power applications, however, present additional challenges. In lowpower applications, the use of EVCs is more straightforward because alow voltage matching network can be used. When a matching network isused in a high power application, however, a high voltage matchingnetwork is required. In a high voltage matching network, the ability toquickly switch EVCs may be limited by the types of high voltage switchesthat are used to switch the EVCs themselves. Thus, there exists a needfor a high voltage switch that can be used in conjunction with an EVC inan RF matching network for quick switching of high voltages (e.g., 2000volts or more). Further, beyond semiconductor fabrication and matchingnetworks, there exists a general need for an improved high voltageswitch.

BRIEF SUMMARY

The present disclosure is directed to a switching circuit and methods,systems, and networks for same. In one aspect, a switching circuitincludes a passive switch coupled to a first switch terminal; a drivingswitch coupled in series with the passive switch and a second switchterminal, the driving switch configured to turn the passive switch onand off; a power source configured to provide power to the passiveswitch and the driving switch; and a monitoring circuit configured toreceive an indication that a switching circuit voltage exceeds apredetermined amount and, in response, reduce the power provided to thedriving switch; or receive an indication that a switching circuitcurrent exceeds a predetermined amount and, in response, reduce thepower provided to the driving switch.

In another aspect, a method of controlling a switching circuit includesproviding a switching circuit comprising a passive switch coupled to afirst switch terminal; a driving switch coupled in series with thepassive switch and a second switch terminal, the driving switchconfigured to turn the passive switch on and off; a power sourceconfigured to provide power to the passive switch and the drivingswitch; and a monitoring circuit; receiving at the monitoring circuit(a) an indication that a switching circuit voltage exceeds apredetermined amount or (b) an indication that a switching circuitcurrent exceeds a predetermined amount; and reducing the power providedto the driving switch in response to the receipt of indication (a) or(b), the reduction of power switching off the switching circuit.

In yet another aspect, and RF impedance matching network includes an RFinput configured to couple to an RF source, the RF source having a fixedRF source impedance; an RF output configured to couple to a load, theload having a variable load impedance; a first circuit comprising afirst variable component providing a first variable capacitance orinductance; and a second circuit comprising a second variable componentproviding a second variable capacitance or inductance; wherein each ofthe first circuit and the second circuit comprise a plurality ofswitching circuits configured to provide the first variable capacitanceor inductance and the second variable capacitance or inductance,respectively, each of the plurality of switching circuits comprising: apassive switch coupled to a first switch terminal; a driving switchcoupled in series with the passive switch and a second switch terminal,the driving switch configured to turn the passive switch on and off; anda power source configured to provide power to the passive switch and thedriving switch.

In yet another aspect, a method of manufacturing a semiconductorincludes placing a substrate in a plasma chamber configured to deposit amaterial layer onto the substrate or etch a material layer from thesubstrate; and energizing plasma within the plasma chamber by couplingRF power from an RF source into the plasma chamber to perform adeposition or etching, and while energizing the plasma determining avariable load impedance of the plasma chamber, with an impedancematching network coupled between the load and the RF source, wherein theRF source has a fixed RF source impedance, and the impedance matchingnetwork comprises an RF input configured to couple to an RF source; anRF output configured to couple to a load; a first circuit in parallel tothe RF input, the first circuit comprising a first variable componentproviding a first variable capacitance or inductance; and a secondcircuit comprising a second variable component providing a secondvariable capacitance or inductance; and determining a first capacitancevalue for the first variable capacitance component and a secondcapacitance value for the second variable capacitance component forcreating an impedance match at an RF input of the impedance matchingnetwork; and generating a control signal to cause the first variablecapacitance component to provide the first capacitance value, or tocause the second variable capacitance component to provide the secondcapacitance value; wherein each of the first circuit and the secondcircuit comprise a plurality of switching circuits configured to providethe first variable capacitance or inductance and the second variablecapacitance or inductance, respectively, each of the plurality ofswitching circuits comprising a passive switch coupled to a first switchterminal; a driving switch coupled in series with the passive switch anda second switch terminal, the driving switch configured to turn thepassive switch on and off; and a power source configured to providepower to the passive switch and the driving switch.

In yet another aspect, a switching circuit includes a passive switchcoupled to a first switch terminal; a driving switch coupled in serieswith the passive switch and a second switch terminal, the driving switchconfigured to turn the passive switch on and off; and a power sourceconfigured to provide power to the passive switch and the drivingswitch.

In yet another aspect, and RF impedance matching network includes an RFinput configured to couple to an RF source, the RF source having a fixedRF source impedance; an RF output configured to couple to a load, theload having a variable load impedance; a transformation circuit coupledto the RF input and configured to provide a transformed impedance thatis less than the fixed source impedance; a first shunt circuit inparallel to the RF input, the first shunt circuit comprising a firstshunt variable component providing a first variable capacitance orinductance; and a first virtual ground coupled to the first shuntvariable component and a ground; and a second shunt circuit in parallelto the RF input and, the second shunt circuit comprising a second shuntvariable component providing a second variable capacitance orinductance; and a second virtual ground coupled to the second shuntvariable component and the ground; wherein each of the first shuntcircuit and the second shunt circuit comprise a plurality of switchingcircuits configured to provide the first variable capacitance orinductance and the second variable capacitance and inductance,respectively, each of the plurality of switching circuits comprising apassive switch coupled to a first switch terminal; a driving switchcoupled in series with the passive switch and a second switch terminal,the driving switch configured to turn the passive switch on and off; anda power source configured to provide power to the passive switch and thedriving switch.

BRIEF DESCRIPTION OF THE DRAWINGS

The foregoing summary, as well as the following detailed description ofthe exemplary embodiments, will be better understood when read inconjunction with the appended drawings. It should be understood,however, that the invention is not limited to the precise arrangementsand instrumentalities shown in the following figures:

FIG. 1A is a schematic representation of a first embodiment of an RFimpedance matching network.

FIG. 1B is a representation of a first embodiment of a virtual ground.

FIG. 2 is a schematic representation of a second embodiment of an RFimpedance matching network.

FIG. 3 is a schematic representation of a third embodiment of an RFimpedance matching network.

FIG. 4 is a schematic representation of a fourth embodiment of an RFimpedance matching network.

FIG. 5 is a schematic representation of a fifth embodiment of an RFimpedance matching network.

FIG. 6 is a schematic representation of a sixth embodiment of an RFimpedance matching network.

FIG. 7 is a schematic representation of a seventh embodiment of an RFimpedance matching network.

FIG. 8 is a schematic representation of an eighth embodiment of an RFimpedance matching network.

FIG. 9 is a schematic representation of a ninth embodiment of an RFimpedance matching network.

FIG. 10 is a schematic representation of a tenth embodiment of an RFimpedance matching network.

FIG. 11 is a schematic representation of a first switching circuit.

FIG. 12 is a schematic representation of a second switching circuit.

FIG. 13 illustrates parasitic capacitances on a switching circuit.

FIG. 14 is a graph of a switched waveform.

FIG. 15 is a block diagram of a switching circuit.

DETAILED DESCRIPTION

The description of illustrative embodiments according to principles ofthe present invention is intended to be read in connection with theaccompanying drawings, which are to be considered part of the entirewritten description. In the description of embodiments of the inventiondisclosed herein, where circuits are shown and described, one of skillin the art will recognize that for the sake of clarity, not alldesirable or useful peripheral circuits and/or components are shown inthe figures or described in the description. Moreover, the features andbenefits of the invention are illustrated by reference to the disclosedembodiments. Accordingly, the invention expressly should not be limitedto such disclosed embodiments illustrating some possible non-limitingcombinations of features that may exist alone or in other combinationsof features; the scope of the invention being defined by the claimsappended hereto.

As used throughout, ranges are used as shorthand for describing each andevery value that is within the range. Any value within the range can beselected as the terminus of the range. In addition, all references citedherein are hereby incorporated by reference in their entireties. In theevent of a conflict in a definition in the present disclosure and thatof a cited reference, the present disclosure controls.

In the embodiments of an RF impedance matching network disclosed herein,the matching network is configured as a “PI” type matching network. Bythis configuration, the switching of the variable capacitance componentsand variable inductance components (sometimes referred to collectivelyas variable components or reactive components) occurs in the shunt ofthe matching circuit. Thus, unlike in other matching networks, such as“L” type matching networks, the exemplified matching network switchesits reactive components to a ground and not in series. There are novariable inductors or capacitors in the series leg.

In these embodiments, an RF impedance matching network includes an RFinput configured to couple to an RF source, the RF source having a fixedRF source impedance; an RF output configured to couple to a load, theload having a variable load impedance; a transformation circuit coupledto the RF input and configured to provide a transformed impedance thatis less than the fixed source impedance; and a PI circuit having a firstshunt circuit in parallel to the RF input and a second shunt circuit inparallel to the RF input and the RF output. The first shunt circuitincludes a first shunt variable component providing a first variablecapacitance or inductance; and a first virtual ground coupled to thefirst shunt variable component and a ground. The second shunt circuitincludes a second shunt variable component providing a second variablecapacitance or inductance; and a second virtual ground coupled to thesecond shunt variable component and the ground.

In general, the circuit configurations are tailored to either aninductive or capacitive load impedance of the chamber. Whether oneconfigures a shunt circuit as an inductor or a capacitor will depend onfactors such as frequency of operation, power, and the appropriatephysical size of the element. For example, smaller inductors will beeasier to package and layout, with lower heat dissipation that is easierto control. Specific embodiments will be described in more detail below.

Turning in detail to the drawings, FIG. 1A illustrates an RF impedancematching network 100 according to a first embodiment of the invention.The matching network 100 includes an RF input 160 configured to coupleto an RF source 110, and an RF output 170 coupled to a load 120. Asensor 162 is coupled at the RF input 160 between the RF source 110 andthe matching network 100. In the exemplified embodiment, the load 120 isa plasma chamber for semiconductor device fabrication. The semiconductordevice can be microprocessor, a memory chip, or another type ofintegrated circuit or device. In other embodiments, the load 120 can beany load of variable impedance that can utilize an RF matching network.

In the exemplified embodiment, the RF impedance matching network 100serves to help maximize the amount of RF power transferred from the RFsource 110 to the plasma chamber 120 by matching the impedance at the RFinput 160 to the fixed impedance of the RF source 110. The matchingnetwork 100 can consist of a single module within a single housingdesigned for electrical connection to the RF source 110 and plasmachamber 120. In other embodiments, the components of the matchingnetwork 100 can be located in different housings, some components can beoutside of the housing, and/or some components can share a housing witha component outside the matching network 100.

As is known in the art, the plasma within a plasma chamber 120 typicallyundergoes certain fluctuations outside of operational control so thatthe impedance presented by the plasma chamber 120 is a variableimpedance. Since the variable impedance of the plasma chamber 120 cannotbe fully controlled, an impedance matching network may be used to createan impedance match between the plasma chamber 120 and the RF source 110.

Moreover, the impedance of the RF source 110 may be fixed at a set valueby the design of the particular RF source 110. Although the fixedimpedance of an RF source 110 may undergo minor fluctuations during use,due to, for example, temperature or other environmental variations, theimpedance of the RF source 110 is still considered a fixed impedance forpurposes of impedance matching because the fluctuations do notsignificantly vary the fixed impedance from the originally set impedancevalue. Other types of RF sources may be designed so that the impedanceof the RF source may be set at the time of, or during, use. Theimpedance of such types of RF sources is still considered fixed becauseit may be controlled by a user (or at least controlled by a programmablecontroller) and the set value of the impedance may be known at any timeduring operation, thus making the set value effectively a fixedimpedance.

The RF source 110 may be an RF generator of a type that is well-known inthe art to generate an RF signal at an appropriate frequency and powerfor the process performed within the plasma chamber 120. The RF source110 may be electrically connected to the RF input 160 of the RFimpedance matching network 100 using a coaxial cable or similar means,which for impedance matching purposes would have the same fixedimpedance as the RF source 110.

The plasma chamber 120 can include a first electrode and a secondelectrode, and in processes that are well known in the art, the firstand second electrodes, in conjunction with appropriate control systems(not shown) and the plasma in the plasma chamber 120, enable one or bothof deposition of materials onto a substrate and etching of materialsfrom the substrate.

The sensor 162 is configured to monitor the RF signal output from the RFsource 110. The sensor 162 can monitor an RF input parameter or multipleRF input parameters at the RF input 160. The sensor 162 can be anysensor configured to detect a parameter at the RF input 160. The inputparameter can be any parameter measurable at the RF input 160 sufficientfor operating the matching network 100. In the exemplified embodiment,the sensor 162 detects the voltage, current, and phase at the RF input160 of the matching network 100. The sensor 162 can provide analoginformation to a control unit 180, where it is converted to a digitalform. Based on the RF input parameter detected by the RF input sensor162, the control unit 180 can determine the variable load impedance. Thecontrol unit 180 can further calculate the necessary switching positionson the shunt legs such that the proper inductance and capacitance isprovided by the variable components 144, 154 for creating an impedancematch. That is, the control unit 180 can determine a first shuntcapacitance value for the first shunt variable capacitance component 144and a second shunt capacitance value for the second shunt variablecapacitance component 154 to create an impedance match at the RF input160. The control unit 180 can then send a control the driver circuit 185to alter a first shunt variable capacitance of the first shunt variablecapacitance component 144; and alter a second shunt variable capacitanceof the second shunt variable capacitance component 154 based on a secondcontrol signal received from the control unit 180. The match need not bea perfect matching of impedance. For example, an impedance match canresult in 10% or less RF power reflected back to the RF source.

Most of the inductive and capacitive components used in the discussedembodiments can be designed on a ceramic substrate or some othermaterial such as Rogers material that can withstand the temperatureexcursions. Particularly at higher power levels and large currents acapacitive array or/and inductive array may be specifically packaged tosatisfy the thermal issues associated with current passing through theshunt elements and series elements at higher power levels. Many of thesecomponents will be either air cooled or water cooled, depending on theparticular architecture used for a specific load.

Transformation Circuit

The matching network 100 of the exemplified embodiment includes both aPI circuit 135 and a transformation circuit 130. The fixed impedancetransformation circuit 130 is located at the front-end of the matchingnetwork 100. The transformation circuit 130 is coupled to the RF input160 and enables the impedance at cross-section A-A looking back towardRF input 160 to be lowered to a value that is less than the real part ofthe fixed RF source impedance, thus providing a desired loweredimpedance at the input of the PI circuit 135 (the PI circuit input 132)that is less than the fixed impedance of the RF source 110. In thisembodiment, the RF source impedance is fixed at 50 Ohms, and RF power istransmitted through coaxial cables which also have a fixed impedance of50 Ohms. In other embodiments, the fixed impedance can be of a differentvalue. In preferred embodiments, the lowered impedance is less than thereal part of the load impedance (R_(L)).

The transformation circuit 130 includes an inductor L1 (sometimesreferred to as a transformation inductor) and a capacitor C1 (sometimesreferred to as a transformation capacitor). In this embodiment, thetransformation inductor L1 is in series with the RF input 160, and thetransformation capacitor C1 is in parallel to the RF input 160 andcoupled to a chassis ground GND. In other embodiments, the configurationis reversed, with the capacitor in series with the RF input 160, and theinductor in parallel to the RF input 160 and coupled to the chassisground GND. The configuration chosen depends on the remaining PI circuit135 and the configuration that prevents the DC component of the load 120returning to the RF source 110. The transformation circuit 130 isconnected to a chassis ground GND (not the virtual grounds, which willbe discussed below). In other embodiments, the chassis ground GND can beanother type of ground.

In the exemplified embodiment, the transformation circuit 130 isconfigured to lower the impedance from 50 Ohms at the RF input 160 toapproximately 15 Ohms at the PI circuit input 132 (the input of the PIcircuit 135), with no imaginary part (or minimal imaginary part). Thus,for example, the output impedance (Z_(o)) of the transformation circuit130 is approximately 15 Ohms+j0. The PI circuit 135 of the matchingnetwork 100 is designed for this reduced input impedance, referred to asZ_(in) FIGS. 1A-10. The interface between the output of thetransformation circuit 130 and the PI circuit 135 is designated by lineA-A.

The transformation circuit 130 can lower the voltage stresses on thematching network 100. Thus, high voltage stress on switches S11 to S1Nand S21 to S2N will be lowered. Such lowered stress enhances thefunctioning of switches such as RF FET switches, PIN diodes, andinsulated-gate bipolar transistors (IGBTs).

This lowered stress can be better understood by the following examples.In the first example, there is no transformation circuit. A 5,000 WattsRF generator (RF source) has a 50 Ohms output impedance (R_(source)) anda frequency of 27.12 MHz that is provided at the RF input 160 of thematching network 100. The matching network 100 is perfectly tuned to 50Ohms at its input and has no reactive components present. The voltage(V=√{square root over (PR)}) therefore will be √{square root over ((5000W)(50 Ohms))}) or 500 V rms. The current (I=V/R) will be 500 V rms/50Ohms, or 10 A rms.

In the second example, a transformation circuit lowers the impedanceprovided at the input 132 of the PI circuit 135 to 15 Ohms. The voltage(V=√{square root over (PR)}) will now be √{square root over ((5000 W)(15Ohms))}) or 273.9 V rms, and the current (I=V/R) will be 273.9 V rms/15Ohms, or 18.3 A rms. Thus, the current increases by a factor of 1.83,while the voltage decreases by a factor of 1.83. The active componentsof the PI circuit 135 more easily handle current than voltage. Thus, thetransformation circuit's reduction of voltage causes less stress on theactive components. A designer can choose for his convenience appropriateimpedance reduction factor. That reduction factor depends on chamberload impedance and its real part (Z_(L)=R_(L)+/−jX_(L)). In preferredembodiments, the reduced input impedance Z_(in) is less than the realpart of the load impedance (R_(L)).

PI Circuit

The PI circuit 135 of FIG. 1A includes a series capacitor C3 in serieswith the RF input 160 and coupled between the transformation inductor L1and the RF output 170. The series capacitor C3 can decouple the DCcomponent to help prevent the DC component of the load 120 fromreturning to the RF source 110. The PI circuit 135 further includes aseries inductor L2 in series with the RF input 160 and coupled betweenthe series capacitor C3 and the RF output 170. The PI circuit 135further includes a first shunt circuit 140 in parallel to the RF input160 and a second shunt circuit 150 parallel to the RF input 160.

The first shunt circuit 140 includes a first shunt capacitor C_(DC) anda first shunt padding inductor L3 _(P). The first shunt capacitor C_(DC)can decouple the DC component of the plasma coming back toward theswitches S11, S12, S1N, such that the switches are not burdened withlarge components of the DC voltage. The first shunt circuit 140 furtherincludes a first shunt variable inductive component 144 comprising (a) aplurality of first shunt inductors L31, L32, L32 coupled in parallel tothe first shunt padding inductor L3 _(P), and (b) a plurality of firstshunt switches S11, S12, S1N coupled to the plurality of first shuntinductors L31, L32, L32 and configured to connect and disconnect each ofthe plurality of first shunt inductors L31, L32, L32 to a first virtualground 142. Also included is a first shunt ground capacitor C1 _(gnd)coupled between the second virtual ground and the ground GND. The firstshunt ground capacitor C1 _(gnd) and a first shunt ground inductanceinherent to the first virtual ground 142 can resonate in series toprovide the lowest possible impedance from the virtual ground to theground GND. The first shunt circuit 140 further includes a first shuntgalvanic return resistor R1 _(G) coupled between the first virtualground 142 and the ground GND. The first shunt ground capacitor C1_(gnd) and the first shunt galvanic return resistor R1 _(G) are coupledin parallel.

The second shunt circuit 150 includes a second shunt variablecapacitance component 154 comprising (a) a plurality of second shuntcapacitors C21, C22, C2N coupled in parallel, and (b) a plurality ofsecond shunt switches S21, S22, S2N coupled to the plurality of secondshunt capacitors C21, C22, C2N and configured to connect and disconnecteach of the plurality of second shunt capacitors C21, C22, C2N to asecond virtual ground 152. The circuit further includes a paddingcapacitor C2 _(P) coupled in parallel to at least one of the pluralityof second shunt capacitors C21, C22, C2N, the padding capacitor C2 _(P)coupled to the second virtual ground 152. The circuit further includes asecond shunt ground capacitor C2 _(gnd) coupled between the secondvirtual ground 152 and the ground GND, and a second shunt galvanicreturn resistor R2 _(G) coupled between the second virtual ground 152and the ground GND. The second shunt ground capacitor C2 _(gnd) and thefirst shunt galvanic return resistor R2 _(G) are coupled in parallel.The capacitors, inductors, and resistors discussed herein can refer toany components of suitable design to provide capacitance, inductance,and resistance, respectively. In preferred embodiments, the matchingnetwork is designed such that, for a particular load, there is minimalpossible variation of capacitors and inductors, thereby allowing thefewest possible switches. Padding capacitors and padding inductors arecapacitors and inductors that do not need to be switched.

The variable inductance components discussed herein can refer to aplurality of shunt inductors and coupled switches, and is sometimesreferred to as an inductive array or simply a variable inductor.Similarly, the variable capacitance components discussed herein canrefer to a plurality of shunt capacitors and coupled switches, and issometimes referred to as a capacitive array or simply as a variablecapacitor. A variable inductance component can refer to any structurecapable of providing a variable inductance, and a variable capacitancecomponent can refer to any structure capable of providing a variablecapacitance. For example, the variable capacitance component can be anelectronic variable capacitor (EVC), as described in U.S. Pat. No.7,251,121. By these components, the capacitances and inductancesprovided in the shunt legs can be controlled such that the combinedimpedances of the RF impedance matching network 100 and the plasmachamber match, or at least substantially match, the fixed impedance ofthe RF source 110. A first shunt variable inductance component 144 and asecond shunt variable capacitance component 154 are shown in FIG. 1A.

Virtual Ground

As discussed above, the switches are not connected directly to chassisground GND but to a virtual ground 142, 152. FIG. 1B shows an embodimentof the first virtual ground 142. The same or a similar structure can beused for virtual ground 152 and the other virtual grounds disclosedherein. In the exemplified embodiment of FIG. 1B, the virtual ground 142is an aluminum plate with embedded tubes 147. The virtual ground 142 iswater cooled, with water (H₂O) flowing in and out of the embedded tubes147. The virtual ground can include thermally conductive isolation padsor paste between the virtual ground surface 145 and the chassis GND toconduct heat and to separate the virtual ground from the chassis groundGND. The pad 143 is not electrically conductive. In other embodiments,the virtual ground 142, 152 can be any electrically conductive componentthat is physically separated from a ground. For example, the virtualground can be arranged vertically or include fins. Further, the virtualground can include other cooling means. For example, at low powerapplications, the virtual ground can be air cooled. Standard heatsinking methods can be applied.

In the exemplified embodiment of FIG. 1B, nine switches S11-S19 aremounted on the surface 145 of the virtual ground 142. The nine switchesS11-S19 correspond with switches S11, S12, and S1N of FIG. 1A, since the“N” can refer to any total number of switches (or any total number ofinductors or capacitors as “N” is used elsewhere in the drawings). Inother embodiments, more or less switches can be used, depending on therequired accuracy of the variable inductance (or variable capacitance inother embodiments).

Switchable and padding components L31-L39 and L3 _(P) (corresponding toL31, L32, L3N, L3 _(P) of FIG. 1A) can also be mounted on the surface145 of the first virtual ground 142, as shown in FIG. 1B. Theexemplified embodiment uses nine switchable inductors, though, as withthe switches discussed above, any number of switchable inductors (orswitchable capacitors depending on the embodiment) can be used. Further,the other virtual grounds disclosed herein can be configured similarly.Thus, the switchable and padding components C21, C22, C2N, C2 _(P) ofthe second shunt circuit 150 can be mounted on a surface of the secondvirtual ground 152 in a manner similar to the surface 145 of virtualground 142 shown in FIG. 1B. Further, similar virtual grounds can beused for the matching network embodiments shown in FIGS. 2-10. Forexample, virtual ground 242 of FIG. 2 can use a virtual groundconfiguration similar to that shown in FIG. 1B, but where capacitorsC11, C12, C1N, C1 _(P) are mounted on the surface of the virtual ground242 instead of inductors L31-L39 and L3 _(P).

As shown in FIG. 1A, the virtual ground 142, 152 can be connected to acommon RF chassis ground GND via a ground capacitor C1 _(gnd), C2_(gnd). The virtual ground 142, 152 has an inherent inductance (L_(gnd))that is generally small. This inherent inductance can connect in serieswith the ground capacitor to create a series resonant circuit. Theseries resonant circuit acts as a short at the frequency of operation.There is also a galvanic return resistor designated as R1 _(G) or R2_(G) that has a much larger value than the series resonance impedance ofL_(gnd) and C_(gnd). Thus, the galvanic connection does not pass themain RF current.

By using a virtual ground for each shunt circuit of variable components,each branch return of RF-switched current can go to one point ground.Since the shunt branch RF current can be very large, they will be mucheasier to control and to stream them away from, for example, FET gatedriving low voltage circuitry. Further, noise immunity and RFinterference within the matching network will be much easier to control.

By the virtual ground, the switches in a shunt circuit can be connectedto a platform from which heat can be better controlled and extracted ifneeded. The RF currents flowing from the tuning capacitors or inductors(e.g., L31, S21) will always flow into the virtual ground 142. Thevirtual ground 142 can also reduce the coupling capacitance from theback side of the switches and their respective FETs to a ground. Eachvariable capacitive or inductive component 144, 154 can have a separatevirtual ground 142, 152 to further reduce the capacitive cross talkamong the switches. The separation of switched currents in the virtualground can help reduce the jitter noise in the switches as well as crosstalk among the switches. These currents can be very difficult to controlat very high RF power levels. The virtual ground can ease the design ofhigh power switches.

After full layout of the circuit, one can determine the inductance ofthe ground connections. A capacitance can be determined for some verysmall impedance from virtual ground to the chassis ground GND bycalculating the needed capacitance C_(gnd). In a preferred embodiment,the capacitor C_(gnd) has a very low ESR (equivalent series resistance)and should withstand several kilovolts of voltage breakdown in case ofovervoltage occurrence on the RF switches. Choosing the propercomponents can prevent the network from being under high voltage stress.The embodiment shown in FIG. 1A is useful for an inductive load chamberand powers below 5 kW.

In the matching network 100 of FIG. 1A and certain other embodimentsdiscussed hereafter, a bypass capacitor C_(DC) (or C4) forms part of theshunt circuit 140 for the purpose of decoupling the DC voltage that maybe reflected from the chamber load 120. This capacitance is not part ofthe matching network 100 in that this capacitance is not used formatching purposes. The capacitor C_(DC) can sustain high voltage swingscoming back from the load 120 and can pass very large RF currents. Forinstance, at RF power P=5 kW, these currents may be in the order of 100A rms. The bypass capacitor C_(DC) can be in series with the variableshunt inductance and can prevent the DC voltage returning from thechamber 120 from reaching the RF switches.

In the exemplified embodiment, the switches use field effect transistors(FETs). In other embodiments, the switches use PIN/NIP diodes, a MicroElectro Mechanical (MEM) switch, a solid state relay, bipolartransistors, insulated-gate bipolar transistors (IGBTs), and the like.In the exemplified embodiment, each switch turns a capacitor or inductorON or OFF to control the overall capacitance or inductance provided bythe variable components 144, 154, thus enabling the matching network 100to provide variable capacitance and variable inductance in the shuntlegs. In alternative embodiments, a switch can be configured to controlmore than one capacitor or inductor.

The matching network 100 includes one or more RF switch driver circuits185. The driver circuits 185 are configured to switch the plurality ofswitches S11, S12, S1N, S21, S22, S2N. Each of the driver circuits 185can include several discrete driving circuits, with each discretedriving circuit configured to switch one of the switches.

The matching network 100 further includes a control unit 180. Thecontrol unit 180 is the brains of the RF impedance matching network 100as it receives multiple inputs from sources such as the sensor 162 andthe driver circuits 185 and makes calculations necessary to determinechanges to the variable capacitance and inductance components 144, 154,and delivers commands to these components 144, 154 to create theimpedance match. The control unit 180 can be of the type that iscommonly used in semiconductor fabrication processes, and thereforeknown to those of skill in the art.

The control unit 180 can be configured with an appropriate processorand/or signal generating circuitry to provide an input signal forcontrolling the driver circuits 185. The control unit 180 of thematching network 100 can be a standard DSP- and FPGA-based architecture.The control unit 180 can house several other circuits, including anovervoltage conditioning circuit 182 for switching off all the activeswitches in the case of overvoltage at the output of the match. Theovervoltage circuit 182 can indicate to the control board when to gointo the shutdown condition.

In the exemplified embodiment, the control unit 180 includes aprocessor. The processor may be any type of properly programmedprocessing device, such as a computer or microprocessor, configured forexecuting computer program instructions (e.g. code). The processor maybe embodied in computer and/or server hardware of any suitable type(e.g. desktop, laptop, notebook, tablets, cellular phones, etc.) and mayinclude all the usual ancillary components necessary to form afunctional data processing device including without limitation a bus,software and data storage such as volatile and non-volatile memory,input/output devices, graphical user interfaces (GUIs), removable datastorage, and wired and/or wireless communication interface devicesincluding Wi-Fi, Bluetooth, LAN, etc. The processor of the exemplifiedembodiment is configured with specific algorithms to enable matchingnetwork 100 to perform the functions described herein.

A power supply (not shown) can be connected to the driver circuits 185,control unit 180, and sensor 162 to provide operational power, at thedesigned currents and voltages, to each of these components.

The inductive and capacitive shunt designs in the PI configurationenable low voltage stresses on the variable components. High voltagestress is particularly hard on active FET switches that must switchlarge potentials as well as large currents at the power levels on theorder of 5 kW. Since the disclosed embodiments do not switch any seriescomponents in these PI configurations, they are fixed in this matchingnetwork 100, and therefore there are lower voltages on the shuntcapacitive or inductive components. This will be shown later in atabular form.

At lower frequencies the inductors may be discrete since they will haveinherently larger values. At higher frequencies such as 13.56 MHz, 27.12MHz, 40.68 MHz, and 60 MHz, the inductors can be made by a method calledspiral inductors and printed on a ceramic substrate.

FIG. 2 is a schematic representation of a second embodiment of an RFimpedance matching network 200. As will be described, this embodimentuses variable capacitance components 244, 254 in both shunt legs. As inFIG. 1A, the matching network 200 includes an RF input 260 configured tocouple to an RF source 210 and an RF output 170 configured to couple toa load 220, a transformation circuit 230, and a PI circuit 235.

The transformation circuit 230 is again coupled to the RF input 260 andconfigured to provide a transformed impedance that is less than thefixed source impedance. The transformation capacitor C1, however, is inseries with the RF input 260, and the transformation inductor L1 is inparallel to the RF input and coupled to the chassis ground GND.

The first shunt circuit 240 is in parallel to the RF input 260. Thecircuit 240 includes a first shunt variable capacitance component 244comprising (a) a plurality of first shunt capacitors C11, C12, C1Ncoupled in parallel, and (b) a plurality of first shunt switches S11,S1, S13 coupled to the plurality of first shunt capacitors C11, C12, C1Nand configured to connect and disconnect each of the plurality of firstshunt capacitors C11, C12, C1N to a first virtual ground 242. The firstshunt circuit 240 further includes a padding capacitor C1 _(P) (“firstshunt padding capacitor”) coupled in parallel to at least one of theplurality of first shunt capacitors C11, C12, C1N, the first shuntpadding capacitor C1 _(P) coupled to the first virtual ground 242; acapacitor C1 _(gnd) (“first shunt ground capacitor”) coupled between thefirst virtual ground 242 and the ground GND; and a resistor R1 _(G)(“first shunt galvanic return resistor”) coupled between the firstvirtual ground 242 and the ground GND.

The second shunt circuit 250 is also in parallel to the RF input 260.Similar to the first shunt circuit 240, the second shunt circuit 250includes a second shunt variable capacitance component 254 comprising(a) a plurality of second shunt capacitors C21, C22, C2N coupled inparallel, and (b) a plurality of second shunt switches S21, S22, S2Ncoupled to the plurality of second shunt capacitors C21, C22, C2N andconfigured to connect and disconnect each of the plurality of secondshunt capacitors C21, C22, C2N to a second virtual ground 252. Thesecond shunt circuit 250 further includes a padding capacitor C2 _(P)(“second shunt padding capacitor”) coupled in parallel to at least oneof the plurality of second shunt capacitors C21, C22, C2N, the secondshunt padding capacitor C2 _(P) coupled to the second virtual ground252; a capacitor C2 _(gnd) (“second shunt ground capacitor”) coupledbetween the second virtual ground 252 and the ground GND; and a resistorR2 _(G) (“second shunt galvanic return resistor”) coupled between thesecond virtual ground 252 and the ground GND.

The matching network 200 further includes a series inductor L2 in serieswith the RF input 260 and coupled between the transformation capacitorC1 and the RF output 270. The embodiment of the matching network 200shown in FIG. 2 is useful for inductive and capacitive loads. Since ithas only one inductor in the series leg, it is efficient. It is usefulfor high power applications that are less than 10 kW.

FIG. 3 is a schematic representation of a third embodiment of an RFimpedance matching network 300. In this embodiment, variable inductors344, 354 are used in both shunt legs. As in the previous figures, thematching network 300 includes an RF input 360 configured to couple to anRF source 310 and an RF output 370 configured to couple to a load 320, atransformation circuit 330, and a PI circuit 335.

Similar to the embodiment shown in FIG. 1A, the transformation inductorL1 is in series with the RF input 360, and the transformation capacitorC1 is in parallel to the RF input 360 and coupled to a chassis groundGND. Also similar to FIG. 1A, the first shunt circuit 340 includes afirst shunt padding inductor L3 _(P); a plurality of first shuntinductors L31, L32, L3N coupled in parallel to the first shunt paddinginductor L3 _(P); a plurality of first shunt switches S11, S12, S1Ncoupled to the plurality of first shunt inductors L31, L32, L3N andconfigured to connect and disconnect each of the plurality of firstshunt inductors L31, L32, L3N to a first virtual ground 342; a firstshunt ground capacitor C1 _(gnd) coupled between the second virtualground 352 and the ground GND; and a first shunt galvanic returnresistor R1 _(G) coupled between the first virtual ground 342 and theground GND. The second shunt circuit 350 is configured similar to thefirst shunt circuit 340. The matching network 300 further includes afirst series capacitor and a second series capacitor coupled in seriesbetween the RF input 360 and the RF output 370.

The embodiment of the matching network 300 shown in FIG. 3 has only oneinductor in the series leg and therefore is more efficient. It is usefulfor high power applications up to more than 5 kW. It is useful forinductive loads.

FIG. 4 is a schematic representation of a fourth embodiment of an RFimpedance matching network 400. This embodiment is similar to theembodiment shown in FIG. 3, however, the first series capacitor C2 iscoupled between the RF input 460 and the first shunt circuit 440, thesecond series capacitor C3 is coupled between the first shunt circuit440 and the second shunt circuit 450, and a single capacitor C4 iscoupled in series with the padding inductor L4 _(P) in the second shuntcircuit 450. The embodiment of the matching network 400 shown in FIG. 4has only one inductor in the series leg and therefore is useful inhigher power matching designs, up to approximately 10 kW. The seriescapacitor C3 is moved away from high current in the load loop, whichimproves efficiency and therefore usefulness for high RF power matching.

FIG. 5 is a schematic representation of a fifth embodiment of an RFimpedance matching network 500. This embodiment is similar to theembodiment shown in FIG. 1A, however, the series inductor L2 is replacedwith a series capacitor C3, a series inductor L4 is added, and singlecapacitor C_(DC) in the first shunt circuit 140 of FIG. 1A iseliminated. The embodiment of the matching network 500 shown in FIG. 5is useful at lower powers up to 5 kW.

FIG. 6 is a schematic representation of a sixth embodiment of an RFimpedance matching network 600. This embodiment is similar to theembodiment shown in FIG. 1A, however, the inductor L1 and capacitor C1of the transformation circuit 630 are reversed, the series capacitor C3of FIG. 1A is eliminated, and the positioning of the first and secondshunt circuit 650s is reversed, such that the first shunt circuit 640has the plurality of switching capacitors C21, C22, C2N, and the secondshunt circuit 650 has the plurality of switching inductors L41, L42,L4N. The embodiment of the matching network 600 shown in FIG. 6 isuseful for medium-to-high powers and inductive loads. Since it has onlyone inductor in the series leg, it can provide good efficiency.

FIG. 7 is a schematic representation of a seventh embodiment of an RFimpedance matching network 700. This embodiment is similar to theembodiment shown in FIG. 2, however, a series inductor L3 is coupledbetween the transformation capacitor C1 and the first shunt circuit 740.The embodiment of the matching network 700 shown in FIG. 7 has twoinductors in the series leg, and therefore is used for lower powersbelow 5 kW.

FIG. 8 is a schematic representation of an eighth embodiment of an RFimpedance matching network 800. This embodiment is similar to theembodiment shown in FIG. 6, however, the inductor L1 and capacitor C1 ofthe transformation circuit 830 are reversed, a series inductor L2 isadded between the transformation inductor L1 and the first shunt circuit840, and the series inductor L2 between the first and second shuntcircuits 840, 850 is replaced with a series capacitor C3. The embodimentof the matching network 800 shown in FIG. 8 is useful for capacitivechamber loads. There are two inductors in the series leg and it isuseful for applications below 5 kW.

FIG. 9 is a schematic representation of a ninth embodiment of an RFimpedance matching network 900. This embodiment is similar to theembodiment shown in FIG. 2, however, an additional series inductor L3 iscoupled between the second shunt circuit 950 and the RF output 970. Theembodiment of the matching network 900 shown in FIG. 9 is useful forcapacitive chamber loads. There are two inductors in the series leg andtherefore more losses. It is useful for applications below 5 kW.

FIG. 10 is a schematic representation of a tenth embodiment of an RFimpedance matching network 1000. This embodiment is similar to theembodiment shown in FIG. 8, however, the series inductor L3 is coupledbetween the first shunt circuit 1040 and the second shunt circuit 1050,and the series capacitor C3 is coupled between the second shunt circuit1050 and the RF output 1070. The embodiment of the matching network 1000shown in FIG. 10 is useful for inductive chamber loads and formedium-to-low RF power applications. It is noted that, where componentsin one embodiment are similarly situated to components in anotherembodiment, the function and characteristics of those components can besimilar, though a detailed discussion of those components is notrepeated for that particular embodiment.

In Table 1, simulated results for typical matching conditions are shownfor the matching network 100 shown in FIG. 1A. The impedance loadconditions are assumed as typical chamber impedances. Values for seriescoupling capacitor C3 (2 nF) and series inductance L2 (8 uH) werespecifically chosen to satisfy the circuit equations under the matchingconditions. R_(L) is representative of the real part of the loadimpedance. P_(out) is the delivered RF power to the load resistor R_(L).The example components were chosen for delivering 5 kW of RF power to aplasma chamber. The simulations show that the matching network cansatisfy all the load impedance conditions for a typical process.

TABLE 1 Matching Network of FIG. 1A Simulation Results. L31, L32, L2C21, C22, R_(L) X_(L) C3 L3N (var.) (fixed) C2N (var.) I_(C3) I_(L2)I_(L) V_(L) P_(out) Ω Ω nF uH uH pF A, rms A, rms A, rms kV, rms kW 1 312 2.52 8 3,080 9.8 15.33 66.4 1.56 5 2 38 2 3.05 8 2,640 11.3 13.3 451.36 5 5 39 2 5 8 2,400 9.9 8.03 30.5 0.812 5.8 10 39 2 5 8 2,300 13.36.8 20 0.691 5.08

Software was used to determine the circuit components values for thevariable shunt elements L3, C2 using the assigned load impedance values.The software then calculated the currents and voltages. As is shown, thematching network can be designed with reasonable values for thecapacitors and inductors. The simulation was carried out at thefrequency f=2 MHz, and therefore the components values reflect thatfrequency. The assumed power was 5 kW. One could choose other value forthe variable shunt elements L3, C2 to attempt to have even smallercurrents and voltages in the variable shunt elements L3, C2.

Switching Circuits

FIGS. 11-15 below discuss switching circuits that can be utilized in theabove matching networks. For example, each of switches S11 to S1N andS21 to S2N in FIG. 2 can utilize one of the switching circuits discussedbelow to switch capacitors C11 to C1N and C21 to C2N, respectively, thusenabling electronically variable capacitance. Similarly, the switchingcircuits can switch the inductors L31 to L3N of FIG. 1 to enablevariable inductance. Accordingly, switches S11 to S19 of FIG. 1B canutilize one of the switching circuits discussed below.

The switching circuits discussed below can also be used outside of RFmatching networks, and outside the realm of high frequency switching.For example, certain switching circuits may be used as a form of highvoltage relay at a low frequency. The disclosed switching circuits canalso be used in equipment such as magnetic resonance circuits, medicalequipment circuits (e.g., ultrasound imaging or x-ray equipment).Another possible application is in telecommunications equipment wherethe antenna impedance should be matched to the transmitter outputimpedance. In such cases as transmitters, there are many applicationswhere the carrier frequency is switched under so-called hot switchingconditions. These switches are also used in handheld transmitters formilitary use, and in many other military applications using varioustransmitters and receivers.

Referring now to FIG. 11, a first switching circuit 1100 is shown. Thefirst switching circuit 1100 comprises a passive switch 1110 coupled toa first switch terminal A. The first switching circuit 1100 furthercomprises a driving switch M1 coupled in series with the passive switch1110 and a second switch terminal B, the driving switch M1 configured toturn the passive 1110 switch on and off. The first switching circuit1100 further comprises a power source 1160 configured to provide powerto the passive switch 1110 and the driving switch M1. The firstswitching circuit 1100 further comprises a monitoring circuit 1150configured to (1) receive an indication that a switching circuit voltageexceeds a predetermined amount and, in response, reduce the powerprovided to the driving switch M1; and (2) receive an indication that aswitching circuit current exceeds a predetermined amount and, inresponse, reduce the power provided to the driving switch M1. In otherembodiments, the monitoring circuit 1150 can be configured to performoperation (1) and not operation (2), or operation (2) and not operation(1). These components and operation will be described further below.

In the exemplified embodiment, the power source 1160 is a switched modepower supply (SMPS). Further, the exemplified switching circuit includesa gate driver 1102 operably coupled to (a) the power source 1160, (b) agate of the passive switch 1110, and (c) a gate of the driving switchM1. In other embodiments, other power sources, drivers, and/oramplifiers can be used as required by the components of the specificswitching circuit.

In the exemplified embodiment, the passive switch 1110 comprises aplurality of switches connected in series. Specifically, the passiveswitch 1110 comprises two high voltage and high current junction gatefield-effect transistors (JFETs) J1, J2. In other embodiments, thepassive switch can comprise any number of switches, and those switchescan be of various types. The exemplified JFETs of the passive switch1110 are connected in series to increase the voltage operation of theswitching circuit 1100.

The first switching circuit 1100 further comprises a driving switch M1coupled in series with the passive switch 1110 and a second switchterminal B. The driving switch M1 can be configured to turn the passiveswitch 1110 on and off. In the exemplified embodiment, the drivingswitch M1 comprises a high voltage and high currentmetal-oxide-semiconductor field-effect transistor (MOSFET). In otherembodiments, other switches can be used, such as a BJT, an IGBT, andeven a relay (e.g., in special applications at low frequency and highcurrents). Connecting the driving switch M1 and passive switch 1110 inseries allows the circuit to use an industry standard gate driverintegrated circuit (IC) with the driving switch M1.

The switching circuit 1100 can be configured such that JFETS J1, J2 arealways turned on, and thereby the JFETS J1, J2 can provide high voltageisolation 1170. Resistors R3 and R4 (which can have large values, e.g.,10 Megaohms) can connect the gate and drain of the JFETs J1, J2 to thesame potential and can force the JFETS to the on condition. The drainvoltages starting on terminal A in FIG. 11 can distribute equally on allthree transistors M1, J1, J2. In other embodiments, the switchingcircuit can include more than two JFETS in series, but the packaging ofthese devices must be such that the high voltage would not break down onthe junctions. A separate circuit that allows equal voltage distributionon the switches is omitted here, as such circuits (e.g., a snubbercircuit) are well known. These switches are typically heat sunk eitheron an air heat sink or water-cooled heat sink.

The first switching circuit 1100 can also include an optocoupler 1106configured to electrically isolate the gate driver IC 1102 from themonitoring circuit 1150 (discussed below). The optocoupler 1106 candrive the gate driver IC 1102 on and off, thus also driving the firstswitching circuit 1100 on and off. Supply line +V can be around 10-15VDC and can be supplied by a switched-mode power supply (SMPS). DCisolation on the SMPS is expected to be greater than 4 kV for thisapplication, thus enabling the switching circuit 1100 to be used in ahigh voltage RF application. In the exemplified embodiment, the lowvoltage monitoring circuit 1150 is isolated from the drains and highvoltage switching voltage by at least 4 kV peak, if not more in otherapplications. For higher power applications on this switching circuit,the voltage separation can be raised even higher. The gate driver canhave the floating SMPS associated with it for that purpose.

The exemplified optocoupler 1106 and gate driver IC 1102 are notconnected to chassis ground GND but to a virtual ground. The main RFground (terminal B) is connected to the virtual ground. The virtualground can be designed similarly to the virtual ground shown in FIG. 1B,which is an aluminum plate with embedded tubes for water cooling.Mounted on the virtual ground can be variable capacitors or inductorsand a switching circuit for each. Thus, components of the switchingcircuit 1100 (e.g., power FETs) can be mounted on the virtual ground. Asdiscussed above, the virtual ground can be connected via a seriesnetwork directly to the chassis ground.

The exemplified virtual ground is floating, and it has an isolation ofthe systems grounds as large as the transformers and the optocouplerswill allow. For that reason, two or more such system switches can beconnected in parallel to increase the current switching capabilities.

The first switching circuit 1100 can be considered “smart” or“self-healing” as it has two automatic shut-off conditions—one forexcessive voltage and one for excessive current. Regarding excessivevoltage, in the exemplified embodiment, the switching circuit 1100 canbe switched off if a voltage on terminal A exceeds a predeterminedvalue. For example, the predetermined value can be 4,000 V.

An excessive voltage indication can be provided by a voltage sensingcircuit 1130, the voltage sensing circuit 1130 comprising (a) a firsttransformer T1 operably coupled to the second terminal B and (b) a firstdiode D1 operably coupled to the monitoring circuit 1150. The switchingcircuit 1100 can be designed such that, if the voltage at terminal A is4,000 V, then the voltage at diode D1 output (voltage sensing circuitoutput) is 4 VDC. The voltage at the diode D1 output can provideevidence of excessive voltage at terminal A or elsewhere in the circuit.

Diode D1 and the optocoupler 1106 can be connected to a monitoringcircuit 1150 for monitoring the switching circuit 1100 for excessivevoltage or current. In the exemplified embodiment, the monitoringcircuit 1150 can be configured to (1) receive an indication that aswitching circuit voltage exceeds a predetermined amount (excessivevoltage indication) and, in response, reduce the power provided to thedriving switch M1; and (2) receive an indication that a switchingcircuit current exceeds a predetermined amount (excessive currentindication) and, in response, reduce the power provided to the drivingswitch M1.

The monitoring circuit 1150 can include low-level logic components todetermine whether a shut-off condition is present. For example,regarding excessive voltage, a first comparator 1151 can be used toreceive the excessive voltage indication. The first comparator 1151 canreceive a threshold voltage V_(ref) on a first terminal and can be setto normally provide an output a logical value “1” (e.g., +4 V). Thefirst comparator 1151 can also receive a signal from the voltage sensingcircuit 1130. When the voltage at the voltage sensing circuit output(the monitor voltage) exceeds the V_(ref), the comparator can change itscondition to logical “0” (e.g., 0 V), thus causing the shut offcondition on gate 1153 for the control signal 1154.

The second shut off condition of the switching circuit 1100 can be basedon current. The switching circuit 1100 can include a current sensingcircuit 1140. The current sensing circuit 1140 can determine a currentpassing from a first switch terminal A to a second switch terminal B ofthe first switching circuit when the switching circuit is turned on bythe control signal 1154. That current can be determined by the RFimpedance load that the first switching circuit 1100 is switching on andoff. This current is similar to load current I_(L) in FIGS. 1A and 3-10.The current sensing circuit 1140 can include (a) a second transformer T2operably coupled to the second terminal B and (b) a second diode D2operably coupled to the monitoring circuit 1150. The current sensingcircuit 1140 can further include sense resistor R_(S). Sense resistorR_(S) is shown adjacent to terminal B in FIG. 11, and its surroundingcomponents are shown in more detail below as part of sensing circuit1140. Sense resistor R_(S) can provide a low resistance (e.g., 10-50mOhms). The circuitry that follows the sense resistor R_(S) can functionlike a high-speed operational amplifier with sufficient gain bandwidthproduct to replicate the RF current waveform. The gain in theoperational amplifier chain must be such that the switching circuit 1100can detect an appreciable RF voltage. In some cases, such as at lowerfrequencies and high currents, the switching circuit 1100 can use acurrent transformer in the source of driving switch M1 instead of asense resistor. If the inductance of the current transformer issufficiently small at the frequency of operation, it can be substitutedfor the R_(S) sense resistor.

The current in the source of the driving switch M1 can thus be detectedand received via the source resistor R_(S). The processing of thecurrent waveform is received by the source resistor R_(S) and theoperational amplifier circuitry that follows the detected waveform. Thesignature of the current in the source of the driving switch M1 can beused to see its amplitude. This current amplitude is detected and can beviewed on an oscilloscope to determine the shape and the frequencyspectrum, if necessary. Further on, after the output of the operationalamplifier A1, there is diode D2. The output of that diode D2 (used as adetector) is a DC voltage proportional to the RMS value of the sourcecurrent in the driving switch M1. This detected DC voltage waveform canbe sent to the second comparator 1152, with a reference voltage V_(ref)on the other terminal of the second comparator 1152. When the detectedvoltage, which is now proportional to the current in the source of thedriving switch M1, is larger than a predetermined value, this can beconsidered an excessive current indication. In this case, the referencevoltage can trip the second comparator 1152 output from its normallyhigh value (logic value “1”) to a low value (logic value “0”). Themonitoring circuit 1150 can thus detect that the current in the drivingswitch M1 has exceeded the predetermined value.

The monitoring circuit 1150 can include an AND logic gate 1153 to switchoff the gate driver IC 1102 when a shut off condition has occurred. Inthe exemplified embodiment, a three-input wide AND logic gate 1153 isutilized. The detector diodes D1, D2, as described above, rectify the RFwaveforms of detected RF voltage and current and covert them to DC sothat the signals can be used at the comparator terminals. Thecomparators 1151, 1152 receive signals from the detector diodes D1, D2.The comparer outputs can be logic signals that are received by the ANDlogic gate 1153. The AND logic gate 1153 can shut off the incomingcontrol signal 1154 if a high voltage or high current condition isindicated. In the exemplified embodiment, when a high voltage conditionis indicated the first comparator output is a logic value 0, and when ahigh voltage condition is indicated the second comparator output is alogic value 0. If the AND logic gate 1153 receives a logic value 0 fromeither comparator 1151, 1152, the AND logic gate 1153 can shut down thecontrol signal 1154 and thereby switch off the gate driver IC 1102. Inso doing, the monitoring circuit 1150 can ensure safe voltage andcurrent operation values. The set of safe operating values can be set bythe appropriate reference voltage values on the comparators 1151 and1152.

The foregoing circuitry can further signal an LED light to tell anoperator that the switching circuit 1100 has exceeded the prescribedvoltage or current value. The LED light can stay on as long as there isan excessive voltage or current condition. In other embodiments, theswitching circuit 1100 can utilize methods other than those describedabove for responding to excessive voltage or excessive currentconditions on the passive switch 1110 and the driving switch M1.

There are several advantages to the described self-healing switch. Othersolutions for shutting off such switches could include the use ofcontrol board algorithms. But such an approach is usually too slow toshut off the driving switch M1 off when the voltage becomes excessive.The exemplified analog hardware implementation is much faster. Thevoltage sensing circuit 1130 is designed such that its frequencybandwidth can be large enough to cover at least the third harmonic ofthe RF frequency that is being switched. For example, if the switchingcircuit 1100 is used in the standard ISM frequency of 13.56 MHz, thebandwidth of the voltage sensing circuit 1130 can be larger than 40.68MHz. This large frequency bandwidth also enables one to see the shape ofthe switched waveform during the switching conditions. That shape can beobserved at terminal A2 before the detector diode D1.

The exemplified switching circuit 1100 can prevent a catastrophic switchfailure in the case of high voltage transient returning back from thevacuum chamber via the matching network and on the RF switches. In highVSWR ratios, that condition could occur, for example, when setting upthe process recipe in the process chamber and other anomalies in thechamber.

The switching circuit 1100 can further include an intermediary switchM10 for enabling the passive switch 1110 to switch simultaneously withthe driving switch M1. In the exemplified embodiment, the intermediaryswitch M10 is a MOSFET, though in other embodiments other switches canbe used. In the exemplified embodiment, the intermediary switch M10 canallow the switching circuit 1100 to disconnect the gate of switch J1when switch M1 is in the OFF condition. This allows slightly larger highvoltage potentials on terminal A.

The exemplified intermediary switch M10 comprises a gate, a drain, and asource. The gate is operably coupled to the power source 1160. In thisembodiment, the gate of the intermediary switch M10 is connected tooutput of the gate driver 1102, though other designs can be used.Further, the drain of the intermediary switch M10 is operably coupled tothe passive switch 1110. In the exemplified embodiment, the drain of theintermediary switch M10 is connected to the gate of switch J1.

If the intermediary switch M10 were not in the gate of switch J1, thegate of switch J1 would be connected to the virtual ground or a bottomterminal B. The maximum voltage on the drain of the driving switch M1would be low in all situations. The drain of driving switch M1 wouldonly see the V_(GS) (gate-source voltage) voltage drop of switch J1. Inthis case, all the voltage drops from terminal A down to terminal Bwould be across the passive switch 1110—in the exemplified embodiment,switches J1, J2. Since the driving switch M1 is used only as a switchingdevice at relatively low voltages, the driving switch M1 would likely bean inexpensive and high speed device.

But in the exemplified embodiment, due to the intermediary switch M10,the gate of driving switch M1 and the gate of switch M10 can be switchedsimultaneously. As a result, the off condition of the series connecteddriving and passive switches M1, 1110 (e.g., vertically cascodedswitches M1, J1, J2) behave differently. Specifically, the high voltagefrom terminal A down to terminal B can be distributed more evenly.Instead of two transistors taking all the high voltage distribution,there can be three transistors distributing the high voltage—in theexemplified embodiment, switches J1, J2 and M1—since the gate of J1 isopened with the switching action of intermediary switch M10.

In this example, switch M1 should have a high voltage rating similar tothose of switches J1, J2. If the gate of switch J1 would be connecteddirectly to ground, the switching circuit could use switch M1 at arelatively low drain voltage. For lower switching voltages, such aconfiguration could be used. Switch M10 can be a low drain currentdevice with a high drain voltage breakdown that does not have to be heatsunk.

The switching circuit 1100 can further include voltage sense capacitorsC1, C2, C3 and C4. A typical design of such a high voltage probe is inthe ratio of 1000:1. The capacitors C1, C2, C3 can therefore be in theorder of 10 pF and at very high break down voltage. Capacitor C4 can beadjusted accordingly to read 1000:1 in voltage ratio.

Resistors R3, R4 can be included to keep the switches J1, J2 on.Further, these resistors R3, R4 can have very high values (e.g., 10 MegaOhms or more), and thus can prevent excessive bleed off of RF current inthe off condition.

In the exemplified embodiment, transformers T1, T2 can be pulsetransformers with a winding isolation in the order of greater than 4 kV.These transformers T1, T2 can detect small voltages in the order of fewmillivolts to a few volts. Both are used as detector transformers. Theycan be very small in size but, since they are pulse transformers, theymust have very large frequency bandwidth response. The bandwidth istypically determined so that the switching circuit 1100 can detect up tothe fifth harmonic of the RF signal being switched. For instance, if theswitching circuit was to switch a high voltage and high current waveformat a fundamental frequency of 10 MHz, the detecting transformers T1, T2can have their bandwidths up to 50 MHz to clearly replicate the drainvoltage after capacitive dividers C1, C2, C3 and C4 for the drainvoltage and the current transformer T2 that will replicate the sourcecurrent in switch M1.

FIG. 12 provides a schematic of a second switching circuit 1200. Thesecond switching circuit 1200 is very similar to the first switchingcircuit 1100 of FIG. 11, and therefore most of the discussion withregard to FIG. 11 applies to also to FIG. 12. Accordingly, comparablecomponents are shown, including gate driver 1202, optocoupler 1206,driving switch M1, voltage sensing circuit 1230, current sensing circuit1240, monitoring circuit 1250, first comparator 1251, second comparator1252, AND logic gate 1253, control signal 1254, and power source 1260.Voltage isolation 1270 is also shown.

The primary difference from first switching circuit 1100 is that thesecond switching circuit 1200 uses MOSFETs M1, M2, M3 in series, insteadof a combination of MOSFETs M1 and JFETs J1, J2. Thus the passive switch1210 uses MOSFETs M2, M3 instead of switches J1, J2. The MOSFETs M1, M2,M3 in the shown vertical position will typically have smallerinter-electrode capacitance. In particular, the MOSFET M3 will typicallyhave a smaller capacitance between the drain and gate and the drain tosource than a JFET for the same current. Since the capacitance will besmaller, the second switching circuit 1200 can operate at slightlyhigher frequencies. The MOSFETs M2, M3 must be kept on (as with switchesJFETS J1, J2), but each MOSFET has its own floating DC voltage to keepit in the on condition. Those floating gate-source voltages V_(GS2),V_(GS3) for M2 and M3 are provided by the power supply 1260. To providethe necessary floating voltages for MOSFETs M1, M2, and M3, the powersupply 1260 (an SMPS) is designed to have three separate secondarywindings from which to make three isolated DC voltages—V_(GS1) (thegate-source voltage of M1), V_(GS2) (the gate-source voltage of M2), andV_(GS3) (the gate-source voltage of M3). The MOSFET M1 is the masterswitch to turn on and off the whole vertical chain of MOSFETs M1, M2 andM3. In both the first switching circuit 1100 and the second switchingcircuit 1200, the clock input terminal to the power supply SMPS 1260 canbe from 100 kHz to 1 MHz in switch mode supplies. The power supply SMPSalso can use the external DC voltage +V_(DD) from an external DC supply.In one embodiment, the external DC voltage can be in the order of +15VDC. This DC supply can be used in the first switching circuit 1100 andthe second switching circuit 1200.

FIG. 13 illustrates parasitic capacitances on a switching circuit 1300.The switching circuit 1300 includes four MOSFET M51, M52, M53, M54connected vertically in series. In other embodiments, other switches canbe used. Switch terminals D and S are floating. First parasiticcapacitances C51-C62 are on each of the MOSFETs. Second parasiticcapacitances C_(SM1)-C_(SM4) are from the back body of the MOSFETs tothe mounting on the heat sink ground GND. Also shown is couplingparasitic capacitances C_(TX1)-C_(TX4) on the gate driver transformers.The parasitic capacitances present possible frequency limitations, andtherefore it can be advantageous to keep the parasitic capacitances aslow as practically possible. When designing switching circuits, it canbe helpful to first predict the parasitic capacitances and from themcalculate the maximum frequency of operation for the switching circuit.

FIG. 14 is a graph of a switched waveform 1400. The waveform 1400 is anexample waveform for one embodiment of the switching circuit. Thefrequency is 2 MHz. The RF voltage switched is 3000 V peak to peak. Theswitching off time is approximately 2 μs. Note the that the switch doesnot swing the full 3000 V due to inherited capacitance in the circuit.Such computer analysis of switching performance can be performed usingP-spice or similar software.

FIG. 15 is a simplified block diagram that provides a basic model forthe switching circuits described above. The switching circuit 1500includes terminals A and B. The outputs are floating. High power voltageand current terminals are electrically isolated from the logic drivenswitching conditions. Since the terminals A and B are floating, suchswitches can be connected in parallel to increase the currentcapability. Such switches can also be connected in series to achieveeven higher voltages. In one example, the switch can provide a highvoltage isolation 1170 of more than 5 kV.

For the circuits discussed above, note that not all components areshown. Rather, the drawings show those components helpful in conveyingan understanding of the circuit and its operation. A person of ordinaryskill in the art will readily understand the role other standardcomponents can play in the circuit.

There are several advantages to the switching circuits discussed above.First, the switching circuits eliminate disadvantages associated withPIN diodes. PIN diodes require elaborate RF choke designs to support theoff condition and DC forward current for turning the PIN diode on. ThePIN diodes also require a high DC voltage to back bias the PIN diode tooff. Further, the disclosed switching circuits can be simpler toimplement. Further, the disclosed switching circuit designs allow forthe addition of further switches (e.g., more FETs) to handle even highervoltages when such switches are connected in series. Further, moreswitches can be connected in parallel to allow for higher currentcapability of the switch.

While the invention has been described with respect to specific examplesincluding presently preferred modes of carrying out the invention, thoseskilled in the art will appreciate that there are numerous variationsand permutations of the above described systems and techniques. It is tobe understood that other embodiments may be utilized and structural andfunctional modifications may be made without departing from the scope ofthe present invention. Thus, the spirit and scope of the inventionshould be construed broadly as set forth in the appended claims.

1. A switching circuit comprising: a passive switch coupled to a firstswitch terminal; a driving switch coupled in series with the passiveswitch and a second switch terminal, the driving switch configured toturn the passive switch on and off; a power source configured to providepower to the passive switch and the driving switch; and a monitoringcircuit configured to: receive an indication that a switching circuitvoltage exceeds a predetermined amount and, in response, reduce thepower provided to the driving switch; or receive an indication that aswitching circuit current exceeds a predetermined amount and, inresponse, reduce the power provided to the driving switch.
 2. Theswitching circuit of claim 1 wherein the switching circuit current is acurrent passing from the first switch terminal to the second switchterminal.
 3. The switching circuit of claim 1 wherein the switchingcircuit voltage is a voltage at a first switch terminal.
 4. Theswitching circuit of claim 1 wherein the driving switch comprises aMOSFET.
 5. The switching circuit of claim 1 wherein the passive switchcomprises a plurality of switches connected in series.
 6. The switchingcircuit of claim 1 wherein the passive switch comprises a first JFET anda second JFET connected in series.
 7. The switching circuit of claim 1wherein the passive switch comprises a first MOSFET and a second MOSFETconnected in series.
 8. The switching circuit of claim 1 wherein anintermediary switch coupled to the passive switch enables the passiveswitch to switch simultaneously with the driving switch.
 9. Theswitching circuit of claim 8 wherein the intermediary switch comprises agate, a drain, and a source, the gate operably coupled to the powersource, and the drain operably coupled to the passive switch.
 10. Theswitching circuit of claim 1 wherein the monitoring circuit isconfigured to: receive an indication that a switching circuit voltageexceeds a predetermined amount and, in response, reduce the powerprovided to the driving switch; and receive an indication that aswitching circuit current exceeds a predetermined amount and, inresponse, reduce the power provided to the driving switch.
 11. Theswitching circuit of claim 10 wherein: the indication that the switchingcircuit voltage has exceeded a predetermined amount is received by afirst comparator; and the indication that the switching circuit currenthas exceeded a predetermined amount is received by a second comparator.12. The switching circuit of claim 10 wherein: the indication that theswitching circuit voltage has exceeded a predetermined amount isprovided by a voltage sensing circuit, the voltage sensing circuitcomprising (a) a first transformer operably coupled to the secondterminal and (b) a first diode operably coupled to the monitoringcircuit; and the indication that the switching circuit current hasexceeded a predetermined amount is provided by a current sensingcircuit, the current sensing circuit comprising (a) a second transformeroperably coupled to the second terminal and (b) a second diode operablycoupled to the monitoring circuit.
 13. The switching circuit of claim 1wherein the power source comprises a switched mode power supply.
 14. Theswitching circuit of claim 13 further comprising a gate driver operablycoupled to the switched mode power supply, a gate of the passive switch,and a gate of the driving switch.
 15. A method of controlling aswitching circuit, the method comprising: providing a switching circuitcomprising: a passive switch coupled to a first switch terminal; adriving switch coupled in series with the passive switch and a secondswitch terminal, the driving switch configured to turn the passiveswitch on and off; a power source configured to provide power to thepassive switch and the driving switch; and a monitoring circuit;receiving at the monitoring circuit (a) an indication that a switchingcircuit voltage exceeds a predetermined amount or (b) an indication thata switching circuit current exceeds a predetermined amount; and reducingthe power provided to the driving switch in response to the receipt ofindication (a) or (b), the reduction of power switching off theswitching circuit.
 16. The method of claim 15 wherein an intermediaryswitch coupled to the passive switch enables the passive switch toswitch simultaneously with the driving switch.
 17. The method of claim16 wherein the intermediary switch comprises a gate, a drain, and asource, the gate operably coupled to the power source, and the drainoperably coupled to the passive switch.
 18. The method of claim 15wherein the monitoring circuit is configured to: receive an indicationthat a switching circuit voltage exceeds a predetermined amount and, inresponse, reduce the power provided to the driving switch; and receivean indication that a switching circuit current exceeds a predeterminedamount and, in response, reduce the power provided to the drivingswitch. 19-20. (canceled)
 21. An RF impedance matching networkcomprising: an RF input configured to couple to an RF source, the RFsource having a fixed RF source impedance; an RF output configured tocouple to a load, the load having a variable load impedance; a firstcircuit comprising a first variable component providing a first variablecapacitance or inductance; and a second circuit comprising a secondvariable component providing a second variable capacitance orinductance; wherein each of the first circuit and the second circuitcomprise a plurality of switching circuits configured to provide thefirst variable capacitance or inductance and the second variablecapacitance or inductance, respectively, each of the plurality ofswitching circuits comprising: a passive switch coupled to a firstswitch terminal; a driving switch coupled in series with the passiveswitch and a second switch terminal, the driving switch configured toturn the passive switch on and off; and a power source configured toprovide power to the passive switch and the driving switch.
 22. The RFimpedance matching network of claim 21 further comprising a monitoringcircuit configured to: receive an indication that a switching circuitvoltage exceeds a predetermined amount and, in response, reduce thepower provided to the driving switch; or receive an indication that aswitching circuit current exceeds a predetermined amount and, inresponse, reduce the power provided to the driving switch. 23-34.(canceled)